UHP FLUID HANDLING & PIPING

We design and manufacture gas panels and gas cabinets with ultra-high purity specifications and controls.

  • Electropolished stainless steel piping (Ra = 0.2 Microns).

  • VCR fitting.

  • Orbital welding.

  • Premanufacturing in class 10 clean room.

  • Helium leak detection.

  • Integration of pneumatic valves, pressure regulator, mass flow controllers, and gas detectors.

THERMAL & CHEMICAL PROCESSES

Several atmospheric and vacuum furnaces are in operation in a class 10 clean room for service or process development.

FURNACE & WET BENCH ENGINEERING

We design and manufacture furnaces including:

  • Gas cabinet

  • Gas panel

  • Thermal cabinet

  • Loading station

  • Full automated process controller

We are building small units for laboratory or large furnace for production line and custom equipment for 4 to 12 inches diameters of wafers.
We also manufacture laboratory and factory scale wet benches.

AUTOMATION

We develop our own automation system in accordance with the specific regulations of defence, aerospace etc. industries based on commercial products.

VACUUM TECHNOLOGIES

We are integrating any mechanical or turbomolecular pump into the systems. Complete systems from primary vacuum to ultra high vacuum are built including pressure and vacuum cycle management.

TOXIC GAS ABATEMENT

We are working on the following technics for toxic gas abatement.

  • Hydrolysis

  • Pyrolysis

  • Plasma

Vegatec proposes:

  • Research and development

  • Custom equipment

  • Gas analysis by mass spectrometry