INDUSTRIAL AND LABORATORY FURNACES

FOR MICRO AND NANO TECHNOLOGIES
CVD Reactors
Helium testers

Design and manufacturing

Process control
Automation
Gas panel
Vacuum System
Loading Station
Processes
  • Oxidation
  • Doping
  • Diffusion
  • Chemical Vapor Deposition
    		•

    Service
    Hook up
    Retrofit
    Refurbish
    Thick Oxidation
    Maintenance

    OXIDATION AND CVD SERVICES
     

    * Very thick thermal oxide for planar wave guide on silicon  at high temperature in wet atmosphere.

    • High temperature in wet atmosphere
    • Thickness : 5 to 15 Microns

    * This oxide in dry atmosphere.

    * Other processes doping or CVD.

     

    SHOCK TUBE
    • Fully automated operation
    • Automated measurement of shock speed
    • Control and display on terminal operator or remote PC
     

    Design and manufacturing

    • Design
    • Manufacturing
    • Installation

    Know-how

    • Shock study
    • Fluids (gas, vacuum)
    • Pneumatics
    • Mecanics

    Application :

    Dynamic pressure sensors calibration
    • Shock speed : Mach 3.3
    • Reflected pressure : > 1000 psi
    • Observation time : > 600 µs
     

    CVD REACTORS

    Design and manufacturing

    Process control
    Automation
    Gas panel
    Vacuum system
    Exhaust treatment
    Gas analysis
    Electronic interfaces
    UHP piping

    DLC

    SILICIDE

    SiO2 / Si3N4
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    HELIUM LEAK TESTERS
    HEAT EXCHANGER APPLICATION
    TORPEDO APPLICATION
    photo
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    FURNACE RETROFIT, REFURBISH AND RELOCATION

    GAS PANEL
    Fluides
    • Design
    • Manufacturing
    • Integration
    • Installation
    • Retrofits
    gas panel
    • Ultra high purity
    • VCR Fittings
    • Electropolished piping
    • Orbital welding
    • Assembly in clean room (Class 100)
    • Helium leat test
    • Flow control
    • Gas detection
     

    PROCESS DEVELOPMENT