Know-how

• Thermal Processe
• Furnace Engineering
• Ultra High Purity gas handling
• Vacuum Technologies
• Toxic gas Abatement
• Process Control
• Gas Analyses

Facilities

• Furnaces
• Clean Room
• Orbital Welding
• CAD System
• UHP Premanufacturing
• Helium Leak Tester
• Mass Spectrometer

Products

• Furnaces for Micro and Nano Technologies
• Oxidation and CVD Services
• Custom Equipments
• Furnace Retrofit, Refurbish and Relocation
• Gas cabinet and gas panel
• Process Development